Research Institute of Precision Machine Manufacturing, JSC (JSC

Russia
Technologies, equipment and materials for electronic manufacturing Electronics and Electronic Components Manufacturing Equipment Microelectronics Equipment
Pavilion 3 Hall 15
Stand No- D7023

JSC NIITM (JSC «Research Institute of Precision Machine Manufacturing», part of the Element Group of Companies) — the institute was established in 1962 as one of the first enterprises of the Scientific Centre of Microelectronics in Zelenograd. The company specialisesin developing a wide range of research and industrial technological equipment: cluster systems; plasma-enhanced etching; plasma-enhanced chemical vapor deposition; physical deposition; growth of epitaxial structures; thermal processing; precision cleaning.